With stringent requirements placed on valves, measurement and control systems, leading process equipment manufacturers within the semiconductor industry demand compliant pneumatically operated valves.

In response, valve specialist GEMÜ has developed the motorised GEMÜ C53 iComLine control valve.

Developed for precise and demanding control applications in semiconductor production, the 2/2-way diaphragm globe valve GEMÜ C53 iComLine features a sealing concept based on the tried-and-tested GEMÜ PD design.

The actuator and medium are separated by a regulating cone made of resistant PTFE. As the regulating cone contour, actuator stroke and connection size can be customised to meet the requirements of the customer, the GEMÜ C53 satisfies virtually all industry control and flow requirements.

The combination of precise stepper motor with ultra-pure body materials guarantees the valve is suitable for lithography, CMP and etching processes, as well as applications in the analysis field of any semiconductor production process.

The GEMÜ C53 iComLine diaphragm globe valve isn’t only able to be installed as a simple 2/2-way valve; it can also be integrated into a GEMÜ PC50 iComLine M-block to realise complex flow charts using minimal space.

For example, when machining silicon wafers, a multi-port valve block can be used in a FOUP cleaner to control the temperature of the DI water. Additionally, check valves and sensors can be integrated into the GEMÜ PCi50 iComLine M-block.

GEMÜ is a global market leader when it comes to solutions for sterile applications. The GEMÜ Group develops and manufactures valves, measurement and control systems for liquids, vapours and gases. Visit for more information.

GEMÜ Group

Related news & editorials

  1. 17.09.2020
    by      In
    ICP Australia is proud to introduce ICP DAS’ NSM-206PFC 4-port 10/100 Mbps PoE(PSE) Ethernet Switch with 2 Fiber Ports (Multi-mode, SC Connector).
     The NSM-206PFC is a 6-port unmanaged Ethernet switch supporting Power-over-Ethernet on ports 1 to 4.
     The switch is classified as power source... Read More
  2. 17.09.2020
    by      In
    With a rugged, mechanical design and a whole host of on-board variables, the Control Devices CDJ420 series joystick can deliver sound performance in a wide variety of applications.
    The CDJ420 is available in single and dual axis configurations and features multiple ergonomic grips and custom switch... Read More
  3. 16.09.2020
    by      In
    Sydney’s 67-storey MLC tower has upgraded a series of switchboards, to ensure continued reliable supply as tenant power requirements continue to change and accelerate.
     Lead electrical contractor on the MLC upgrade project, Barnwell Cambridge, chose Australian-manufactured Fuji SMBE Macquarie... Read More
  4. 15.09.2020
    by      In
    Coregas, Hyundai and Jemena have signed a deal to strengthen hydrogen supply lines to Australia’s zero-emission vehicle industry.
    The trio recently signed a Memorandum of Understanding (MoU) that sees the production and delivery of hydrogen gas to Hyundai’s Macquarie Park headquarters from early... Read More